WEKO3
アイテム
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繊維/ウレタン樹脂複合型研磨パッドの試作と加工特性
https://doi.org/10.24561/00016644
https://doi.org/10.24561/00016644b85bfc8f-7304-48ad-8556-9c559d619e36
名前 / ファイル | ライセンス | アクション |
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KY-AA11808968-03-06.pdf (178.5 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-05-21 | |||||
タイトル | ||||||
タイトル | 繊維/ウレタン樹脂複合型研磨パッドの試作と加工特性 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CMP | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Polishing Pad | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Fiber | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | ILD | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Removal Rate | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Surface Roughness | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016644 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | A Trial Product and Its Processing Characteristic of the Polishing Pad Using FiberComposited polyurethan | |||||
著者 |
田辺, 克行
× 田辺, 克行× 土肥, 俊郎 |
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著者 ローマ字 | ||||||
Tanabe, Katsuyuki | ||||||
著者 ローマ字 | ||||||
Toshiroh K. Doy | ||||||
著者 所属 | ||||||
ユニチカ株式会社中央研究所 | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属(別言語) | ||||||
UNITIKA LTD | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
書誌情報 |
埼玉大学地域共同研究センター紀要 en : Report of Cooperative Research Center, Saitama University 巻 3, p. 25-28, 発行日 2003 |
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年月次 | ||||||
2002 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学地域共同研究センター | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474758 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | The new type Polishing Pad for CMP is composed two materials which are fibers and non-foamed polyurethane. Fibers are perpendicular to the face ofthe polishing pad. A new pad shows higher removal rate of Si02 filmformed over silicon wafer than conventional pad, but the effects of fibers are unkown. We will manufacture pads thar contain various fibers or increase quantities of fibers,and exmamine effects of fiber for CMP. |
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資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-06-18 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AA11808968-03-06 |