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CMP用パッドのコンディショニングに関する基礎研究(第二報)
https://doi.org/10.24561/00016784
https://doi.org/10.24561/000167847d9ca79d-faff-4e04-9cb0-9a6e0f73339e
名前 / ファイル | ライセンス | アクション |
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KY-AA11808968-07-07.pdf (706.0 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-03-03 | |||||
タイトル | ||||||
タイトル | CMP用パッドのコンディショニングに関する基礎研究(第二報) | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016784 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Basic Research on Conditioning of CMP Pad (2nd report) | |||||
著者 |
門村, 和徳
× 門村, 和徳× 福西, 利夫× 土肥, 俊郎× 内田, 亮太 |
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著者 ローマ字 | ||||||
Kadomura, Kazunori | ||||||
著者 ローマ字 | ||||||
Fukunishi, Toshio | ||||||
著者 ローマ字 | ||||||
Doi, Toshiro | ||||||
著者 ローマ字 | ||||||
Uchida, Ryota | ||||||
著者 所属 | ||||||
株式会社アライドダイヤモンド | ||||||
著者 所属 | ||||||
株式会社アライドマテリアル | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属(別言語) | ||||||
A.L.M.T. Diamond Corp. | ||||||
著者 所属(別言語) | ||||||
A.L.M.T. Corp. | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
書誌情報 |
埼玉大学地域共同研究センター紀要 en : Report of Cooperative Research Center, Saitama University 巻 7, p. 24-26, 発行日 2007 |
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年月次 | ||||||
2006 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学総合研究機構地域共同研究センター産学連携推進部門 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474758 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | As the basic research for the Pad conditioning by the Diamond Conditioner, relationship between the surface condition of pad, which is ground by the diamond pad conditioner, and the Polishing Rate is investigated. Clogging of the pad surface, the surface conditions achieved by specification of the various pad conditioners and various parameters of the conditioning on the Oxide-CMP Process are correlated. | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-03-02 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AA11808968-07-07 |