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スピネル型構造をもつZn-Sn系複合酸化物薄膜のガス検知特性
https://sucra.repo.nii.ac.jp/records/12837
https://sucra.repo.nii.ac.jp/records/128372257641a-5b02-4825-8cba-570e616a15ab
名前 / ファイル | ライセンス | アクション |
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A1002221.pdf (691.5 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-09-21 | |||||
タイトル | ||||||
タイトル | スピネル型構造をもつZn-Sn系複合酸化物薄膜のガス検知特性 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Gas sensor | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Evaporation method | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Zn_2SnO_4 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thin film | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Gas selectivity | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
タイトル(別言語) | ||||||
その他のタイトル | Gas Sensing Characteristics of Zinc-Tin Complex Oxide Thin Films with Spinel-Type Structure | |||||
著者 |
平塚, 信之
× 平塚, 信之× 小林, 裕× 内田, 秀和× 勝部, 昭明 |
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著者 ローマ字 | ||||||
HIRATSUKA, Nobuyuki | ||||||
著者 ローマ字 | ||||||
KOBAYASHI, Hiroshi | ||||||
著者 ローマ字 | ||||||
UCHIDA, Hidekazu | ||||||
著者 ローマ字 | ||||||
KATSUBE, Teruaki | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属(別言語) | ||||||
Graduate School of Science and Engineering., Saitama University | ||||||
著者 所属(別言語) | ||||||
Graduate School of Science and Engineering., Saitama University | ||||||
著者 所属(別言語) | ||||||
Graduate School of Science and Engineering., Saitama University | ||||||
著者 所属(別言語) | ||||||
Graduate School of Science and Engineering., Saitama University | ||||||
書誌情報 |
日本セラミックス協会学術論文誌 巻 104, 号 1215, p. 1048-1051, 発行日 1996 |
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年月次 | ||||||
1996-11 | ||||||
出版者名 | ||||||
出版者 | 社団法人日本セラミックス協会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09145400 | |||||
関連サイト | ||||||
内容記述タイプ | Other | |||||
内容記述 | http://ci.nii.ac.jp/naid/110002291398/ | http://ci.nii.ac.jp/naid/110002291398/ | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Zn-Sn metallic films were deposited on alumina substrates by an evaporation method, and then complex oxide films were fabricated by annealing in air. The relation between the formation of spinel-type Zn_2SnO_4 and their sensing characteristics to i-C_4H_<10> gas was studied. Both ZnO and SnO_2 films annealed at 500℃ had higher sensitivity to i-C_4H_<10> than the complex oxide films of ZnO and SnO_2 because of fine crystallinity. The sensitivities of the complex oxide films increased with increasing annealing temperature from 600 to 800℃, because of the improved crystallinity. Higher sensitivities were obtained by laminating the complex oxide films. Moreover, the gas selectivity of Zn-Sn complex oxide films for several kinds of gases was investigated. The Zn-Sn complex oxide film had a very high sensitivity to NO_2 gas. | |||||
注記 | ||||||
内容記述タイプ | Other | |||||
内容記述 | rights: 社団法人日本セラミックス協会 rights: 本文データは学協会の許諾に基づきCiNiiから複製したものである relation: isVersionOf: http://ci.nii.ac.jp/naid/110002291398/ |
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資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2007-09-21 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
A1002221 |