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Nano-scale anodic oxidation on a Si(111) surface terminated by bilayer-GaSe
https://sucra.repo.nii.ac.jp/records/13242
https://sucra.repo.nii.ac.jp/records/1324252c682ac-2d89-411b-8100-09a1c20ee577
名前 / ファイル | ライセンス | アクション |
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A1002626.pdf (549.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2008-04-22 | |||||
タイトル | ||||||
タイトル | Nano-scale anodic oxidation on a Si(111) surface terminated by bilayer-GaSe | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | atomic force microscopy | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | etching | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | oxidation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | silicon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | gallium selenide | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | silicon oxides | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
上野, 啓司
× 上野, 啓司× Okada, R× 斉木, 幸一朗× 小間, 篤 |
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著者 ローマ字 | ||||||
Ueno, Keiji | ||||||
著者 ローマ字 | ||||||
Okada R, | ||||||
著者 ローマ字 | ||||||
Saiki, Koichiro | ||||||
著者 ローマ字 | ||||||
Koma, Atsushi | ||||||
著者 所属 | ||||||
東京大学大学院理学系研究科(現 : 埼玉大学大学院理工学研究科物質科学部門) | ||||||
著者 所属(別言語) | ||||||
Department of Chemistry, Graduate School of Science, The University of Tokyo(Present : Graduate School of Science and Engineering, Saitama University) | ||||||
書誌情報 |
SURFACE SCIENCE Sp. Iss. SI 巻 514, 号 1-3, p. 27-32, 発行日 2002 |
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年月次 | ||||||
2002-8 | ||||||
出版者名 | ||||||
出版者 | Elsevier Science B.V. | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 00396028 | |||||
DOI | ||||||
関連タイプ | isVersionOf | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1016/S0039-6028(02)01603-5 | |||||
関連サイト | ||||||
内容記述タイプ | Other | |||||
内容記述 | http://www.sciencedirect.com/science/journal/00396028 | http://www.sciencedirect.com/science/journal/00396028 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Nano-scale oxide patterns were fabricated on a bilayer-GaSe terminated Si(1 1 1) surface using an atomic force microscope (AFM) in air. The Si(1 1 1) surface regularly terminated by bilayer-GaSe is very stable in air, although it can be oxidized through the electrochemical reaction when positive sample bias voltage is applied between the surface and a conductive cantilever tip of AFM. It has been revealed that higher sample bias voltage, slower tip velocity and/or higher ambient humidity produce wider and/or thicker oxide protrusions. Then, nano-scale oxide patterns as narrow as 50 nm have been successfully drawn on the terminated surface by adjusting these experimental conditions. These oxide lines can be etched away by dipping the sample into aqueous HF solution, and nano-scale grooves can be fabricated on the bilayer-GaSe terminated Si(1 1 1) surface. (C) 2002 Elsevier Science B.V. All rights reserved. | |||||
版 | ||||||
[著者版] | ||||||
著者版フラグ | ||||||
出版タイプ | AM | |||||
出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2008-04-22 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
A1002626 |