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Vacuum electrical breakdown characteristics and surface condition of Ti electrodes with oxidation conditions
https://sucra.repo.nii.ac.jp/records/13359
https://sucra.repo.nii.ac.jp/records/133592eaa4578-c9f4-40a5-8495-f737174dfa6e
名前 / ファイル | ライセンス | アクション |
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A1002805.pdf (423.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2008-12-03 | |||||
タイトル | ||||||
タイトル | Vacuum electrical breakdown characteristics and surface condition of Ti electrodes with oxidation conditions | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | vacuum breakdown | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ti | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | mechanochemical polishing | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | X-ray photoelectron spectroscopy | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | conditioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | oxidation | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Ito, Y
× Ito, Y× 山納, 康× 小林, 信一 |
|||||
著者 ローマ字 | ||||||
Ito, Y, | ||||||
著者 ローマ字 | ||||||
Yamano, Yasushi | ||||||
著者 ローマ字 | ||||||
Kobayashi, Shin'Ichi | ||||||
著者 ローマ字 | ||||||
Saito, Yoshio | ||||||
著者 所属 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科数理電子情報部門 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科数理電子情報部門 | ||||||
著者 所属(別言語) | ||||||
Department of Electrical and Electronic Systems, Saitama University | ||||||
著者 所属(別言語) | ||||||
Department of Electrical and Electronic Systems, Saitama University | ||||||
著者 所属(別言語) | ||||||
Department of Electrical and Electronic Systems, Saitama University | ||||||
著者 所属(別言語) | ||||||
High Energy Accelerator Research Organization | ||||||
書誌情報 |
IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION 巻 13, 号 1, p. 98-104, 発行日 2006 |
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年月次 | ||||||
2006-2 | ||||||
出版者名 | ||||||
出版者 | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 10709878 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1109/TDEI.2006.1593407 | |||||
関連サイト | ||||||
内容記述タイプ | Other | |||||
内容記述 | http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=1593407 | http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=1593407 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Outgassing from an electrode surface is regarded as a major factor leading to electrical breakdowns in vacuum. Recently oxidation treatment at 200 degrees C was reported as an effective means of reducing Ti outgassing. In this paper, we report our measurement and comparison of the electrical breakdown characteristics of Ti electrodes with different oxidation conditions (without oxidation, oxidation at 200 degrees C, oxidation at 450 degrees C). In addition, we analyzed electrode surfaces before and after breakdown experiments in situ with X-ray photoelectron spectroscopy (XPS). Before oxidation, we machined the electrode's surfaces to the roughness of 0.8 mu m Rmax with diamond turning. Breakdown experiments demonstrated that the breakdown field is highest at the first application of voltage to electrodes with oxidized at 200 degrees C. Before breakdown experiment, surface analysis revealed that all the sample electrodes had a large amount of carbon originating from the hydrocarbons of contaminants, and after the experiments, they revealed that the carbons had disappeared. To obtain breakdown characteristics of electrodes with smoother surfaces, we conducted experiments on electrodes with a surface roughness of 0.05 mu m Ra. For these electrodes, the breakdown field was higher at first breakdown; the repetitions required to achieve saturated breakdown fields were significantly fewer, and the amount of carbon on electrode surfaces before breakdown was less. | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2008-12-03 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
A1002805 |