WEKO3
アイテム
{"_buckets": {"deposit": "665c7853-9406-4c12-b616-8fb02ae0c398"}, "_deposit": {"created_by": 3, "id": "14763", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "14763"}, "status": "published"}, "_oai": {"id": "oai:sucra.repo.nii.ac.jp:00014763", "sets": ["484"]}, "author_link": ["25053", "16494", "25054"], "item_120_alternative_title_1": {"attribute_name": "タイトル(別言語)", "attribute_value_mlt": [{"subitem_alternative_title": "Semiconductor Micro Oxygen Sensor Workable at Room Temperature."}]}, "item_120_biblio_info_8": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1991", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "20", "bibliographicPageStart": "17", "bibliographicVolumeNumber": "11", "bibliographic_titles": [{"bibliographic_title": "CACS FORUM"}]}]}, "item_120_date_31": {"attribute_name": "作成日", "attribute_value_mlt": [{"subitem_date_issued_datetime": "2010-01-13", "subitem_date_issued_type": "Created"}]}, "item_120_description_19": {"attribute_name": "概要", "attribute_value_mlt": [{"subitem_description": "A sputtered LaF3 film was applied to construct a semiconductor micro-oxygen sensor consisting of a Pt/LaF3/SiO2/n-Si/Al structure. The sensor showed a stable response in the oxygen partial pressure range of 0.1-1.0 atm at ambient temperature. The sensitivity and response time strongly depended on the fabrication conditions of LaF3 and Pt films, and the optimum sputtering conditions to prepare the films were investigated. The highly sensitive sensor element was obtained at a relatively high deposition rate (15nm/min)of LaF3 film and at a high Ar pressure of 10.7Pa. It was shown from ESCA analysis that the higher sensitivity was attained by the higher[F]/[La]ratio[x]of the LaFx film.", "subitem_description_type": "Other"}]}, "item_120_description_29": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "text", "subitem_description_type": "Other"}]}, "item_120_description_30": {"attribute_name": "フォーマット", "attribute_value_mlt": [{"subitem_description": "application/pdf", "subitem_description_type": "Other"}]}, "item_120_identifier_registration": {"attribute_name": "ID登録", "attribute_value_mlt": [{"subitem_identifier_reg_text": "10.24561/00014757", "subitem_identifier_reg_type": "JaLC"}]}, "item_120_publisher_11": {"attribute_name": "出版者名", "attribute_value_mlt": [{"subitem_publisher": "埼玉大学分析センター"}]}, "item_120_relation_7": {"attribute_name": "著者 外部リンク", "attribute_value_mlt": [{"subitem_relation_name": [{"subitem_relation_name_text": "\u0026EMPTY\u0026"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "\u0026EMPTY\u0026", "subitem_relation_type_select": "URI"}}, {"subitem_relation_name": [{"subitem_relation_name_text": "\u0026EMPTY\u0026"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "\u0026EMPTY\u0026", "subitem_relation_type_select": "URI"}}, {"subitem_relation_name": [{"subitem_relation_name_text": "http://s-read.saitama-u.ac.jp/researchers/pages/researcher/BZhVsmBx"}], "subitem_relation_type_id": {"subitem_relation_type_id_text": "http://s-read.saitama-u.ac.jp/researchers/pages/researcher/BZhVsmBx", "subitem_relation_type_select": "URI"}}]}, "item_120_text_27": {"attribute_name": "版", "attribute_value_mlt": [{"subitem_text_value": "[出版社版]"}]}, "item_120_text_3": {"attribute_name": "著者 ローマ字", "attribute_value_mlt": [{"subitem_text_value": "KATSUBE, Teruaki"}, {"subitem_text_value": "HARA, Masashi"}, {"subitem_text_value": "UCHIDA, Hidekazu"}]}, "item_120_text_32": {"attribute_name": "アイテムID", "attribute_value_mlt": [{"subitem_text_value": "KY-AN10402595-11-04"}]}, "item_120_text_35": {"attribute_name": "公開日(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "Nov 12, 2009 11:15:31"}]}, "item_120_text_36": {"attribute_name": "記録日(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "2010-01-13"}]}, "item_120_text_37": {"attribute_name": "最終更新日(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "Jan 18, 2010 12:18:30"}]}, "item_120_text_38": {"attribute_name": "公開日(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "Nov 12, 2009 11:15:31"}]}, "item_120_text_39": {"attribute_name": "更新履歴(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "Jan 18, 2010 タイトル, インデックス, タイトル タイトル, 抄録 を変更"}, {"subitem_text_value": "Jan 13, 2010 インデックス, 作成日, 記録日 を変更"}, {"subitem_text_value": "Nov 16, 2009 出版者, 抄録, 著者 を変更"}]}, "item_120_text_4": {"attribute_name": "著者 所属", "attribute_value_mlt": [{"subitem_text_value": "埼玉大学工学部情報工学科"}, {"subitem_text_value": "埼玉大学工学部情報工学科"}, {"subitem_text_value": "埼玉大学工学部情報工学科"}]}, "item_120_text_40": {"attribute_name": "登録者(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "sucra_jim4"}]}, "item_120_text_41": {"attribute_name": "閲覧数(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "510"}]}, "item_120_text_42": {"attribute_name": "ダウンロード数(XooNIps)", "attribute_value_mlt": [{"subitem_text_value": "1086"}]}, "item_120_text_43": {"attribute_name": "XooNIps_インデックス", "attribute_value_mlt": [{"subitem_text_value": "sucra_jim4/埼玉大学/murata|Public/埼玉大学/理工学研究科/数理電子情報部門|Public/ジャンル別/研究紀要/埼玉大学/CACS FORUM|Public/埼玉大学/理工学研究科|Public/主題別/工学/電気電子工学/計測工学"}]}, "item_120_text_44": {"attribute_name": "XooNIps_ITEM_KEY", "attribute_value_mlt": [{"subitem_text_value": "8543"}]}, "item_120_text_5": {"attribute_name": "著者 所属(別言語)", "attribute_value_mlt": [{"subitem_text_value": "Department of Information and Computer Science, Faculty of Engineering, Saitama University"}, {"subitem_text_value": "Department of Information and Computer Science, Faculty of Engineering, Saitama University"}, {"subitem_text_value": "Department of Information and Computer Science, Faculty of Engineering, S"}]}, "item_120_text_9": {"attribute_name": "年月次", "attribute_value_mlt": [{"subitem_text_value": "1991-11"}]}, "item_120_version_type_28": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "勝部, 昭明"}, {"creatorName": "カツベ, テルアキ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "25053", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "原, 正史"}, {"creatorName": "ハラ, マサシ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "25054", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "内田, 秀和"}, {"creatorName": "ウチダ, ヒデカズ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "16494", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "BZhVsmBx", "nameIdentifierScheme": "研究者総覧", "nameIdentifierURI": "http://s-read.saitama-u.ac.jp/researchers/pages/researcher/BZhVsmBx"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2018-01-24"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "KY-AN10402595-11-04.pdf", "filesize": [{"value": "209.3 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 209300.0, "url": {"label": "KY-AN10402595-11-04.pdf", "url": "https://sucra.repo.nii.ac.jp/record/14763/files/KY-AN10402595-11-04.pdf"}, "version_id": "4ec8823e-c5e4-4af6-a117-17329473a954"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "常温で作動する半導体マイクロ酸素センサー\u003cミニノート\u003e", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "常温で作動する半導体マイクロ酸素センサー\u003cミニノート\u003e"}]}, "item_type_id": "120", "owner": "3", "path": ["484"], "permalink_uri": "https://doi.org/10.24561/00014757", "pubdate": {"attribute_name": "公開日", "attribute_value": "2009-11-12"}, "publish_date": "2009-11-12", "publish_status": "0", "recid": "14763", "relation": {}, "relation_version_is_last": true, "title": ["常温で作動する半導体マイクロ酸素センサー\u003cミニノート\u003e"], "weko_shared_id": -1}
常温で作動する半導体マイクロ酸素センサー<ミニノート>
https://doi.org/10.24561/00014757
https://doi.org/10.24561/00014757a5d4aae7-e5be-4b85-b14a-d5336ada848d
名前 / ファイル | ライセンス | アクション |
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KY-AN10402595-11-04.pdf (209.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-11-12 | |||||
タイトル | ||||||
タイトル | 常温で作動する半導体マイクロ酸素センサー<ミニノート> | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00014757 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Semiconductor Micro Oxygen Sensor Workable at Room Temperature. | |||||
著者 |
勝部, 昭明
× 勝部, 昭明× 原, 正史× 内田, 秀和 |
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著者 ローマ字 | ||||||
KATSUBE, Teruaki | ||||||
著者 ローマ字 | ||||||
HARA, Masashi | ||||||
著者 ローマ字 | ||||||
UCHIDA, Hidekazu | ||||||
著者 所属 | ||||||
埼玉大学工学部情報工学科 | ||||||
著者 所属 | ||||||
埼玉大学工学部情報工学科 | ||||||
著者 所属 | ||||||
埼玉大学工学部情報工学科 | ||||||
著者 所属(別言語) | ||||||
Department of Information and Computer Science, Faculty of Engineering, Saitama University | ||||||
著者 所属(別言語) | ||||||
Department of Information and Computer Science, Faculty of Engineering, Saitama University | ||||||
著者 所属(別言語) | ||||||
Department of Information and Computer Science, Faculty of Engineering, S | ||||||
書誌情報 |
CACS FORUM 巻 11, p. 17-20, 発行日 1991 |
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年月次 | ||||||
1991-11 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学分析センター | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | A sputtered LaF3 film was applied to construct a semiconductor micro-oxygen sensor consisting of a Pt/LaF3/SiO2/n-Si/Al structure. The sensor showed a stable response in the oxygen partial pressure range of 0.1-1.0 atm at ambient temperature. The sensitivity and response time strongly depended on the fabrication conditions of LaF3 and Pt films, and the optimum sputtering conditions to prepare the films were investigated. The highly sensitive sensor element was obtained at a relatively high deposition rate (15nm/min)of LaF3 film and at a high Ar pressure of 10.7Pa. It was shown from ESCA analysis that the higher sensitivity was attained by the higher[F]/[La]ratio[x]of the LaFx film. | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2010-01-13 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AN10402595-11-04 |