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CVD法による鉛ガラス薄膜の特性<ミニノート>
https://doi.org/10.24561/00014779
https://doi.org/10.24561/000147792b39be80-1c9d-430b-a442-755dfef0e76e
名前 / ファイル | ライセンス | アクション |
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KY-AN10402595-13-05.pdf (192.0 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-11-12 | |||||
タイトル | ||||||
タイトル | CVD法による鉛ガラス薄膜の特性<ミニノート> | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00014779 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Characteristics of Lead Glass Films by CVD Method | |||||
著者 |
高橋, 幸郎
× 高橋, 幸郎 |
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著者 ローマ字 | ||||||
TAKAHASHI, Kohro | ||||||
著者 所属 | ||||||
埼玉大学工学部電気電子工学科 | ||||||
著者 所属(別言語) | ||||||
Department of Electrical Enguneering and Electronics, Faculty of Engineering, Saitama University | ||||||
書誌情報 |
CACS FORUM 巻 13, p. 18-21, 発行日 1993 |
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年月次 | ||||||
1993-12 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学分析センター | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | A new fabrication method of silicon micro channel plate (MCP) by semiconductor microfabrication technologies has developed instead of conventional MCP using glass micro capillaries. This fabrication method stands on the technologies of chemical vapor deposition (CVD) to deposit electron multiplication films on the sufaces of the micro channels. The electron multiplication films are lead glass using tetra-ethyl lead and silicon tetra-ethoxide or silicon tatra-methoxide. The composition ratio of silicon and lead in the films changes according to a ratio of the flow rate of the supplied gas sources. The sheet resistance of the films depends on the film composision, annealing and hydrogen reduction conditions. A suitable sheet resistance for the application to MCP can be performed by controlling there conditions. | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2010-01-14 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AN10402595-13-05 |