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昇華性錯体を利用したCVD法による金属薄膜および酸化物薄膜の調製<ミニノート>
https://doi.org/10.24561/00014780
https://doi.org/10.24561/000147802f31e667-5478-448c-9108-641b6c4a9cae
名前 / ファイル | ライセンス | アクション |
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KY-AN10402595-13-06.pdf (162.2 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-11-12 | |||||
タイトル | ||||||
タイトル | 昇華性錯体を利用したCVD法による金属薄膜および酸化物薄膜の調製<ミニノート> | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00014780 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Preparation of Metaland Oxide Thin Films by Means of CVD method Using Volatile Complexes | |||||
著者 |
三浦, 弘
× 三浦, 弘× 樋口, 博士× 伊藤, 寛太 |
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著者 ローマ字 | ||||||
MIURA, Hiroshi | ||||||
著者 ローマ字 | ||||||
HIGUCHI, Hiroshi | ||||||
著者 ローマ字 | ||||||
ITO, Kanta | ||||||
著者 所属 | ||||||
埼玉大学工学部応用化学科 | ||||||
著者 所属 | ||||||
埼玉大学工学部応用化学科 | ||||||
著者 所属 | ||||||
埼玉大学工学部応用化学科 | ||||||
著者 所属(別言語) | ||||||
Department of Applled Chemistry, Faculty of Engineering, Saitama University | ||||||
著者 所属(別言語) | ||||||
Department of Applled Chemistry, Faculty of Engineering, Saitama UniversityDepartment of Applled Chemistry, Faculty of Engineering, Saitama University | ||||||
書誌情報 |
CACS FORUM 巻 13, p. 22-25, 発行日 1993 |
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年月次 | ||||||
1993-12 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学分析センター | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | A novel CVD system has been examined to deposit metal complex compounds over catalytically active substrate surfaces in flowing gases at ambient pressure. Thus, metallic thin films of Fe, Co and Cu were obtained on Ni substrate in a flowing hydrogen, whereas metal oxide films of these metals were obtained in a flowing oxygen. It is able to controll the chemical composition of the resulting film by changing the flowing gas. In addition a gradient film of Cu, which changed its chemical composition gradually from metal to Cu oxide, was obtained by changing the composition of flowing gas gradually from argon to oxygen. Such a film suggested high torelance against thermal shock. | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2010-01-14 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AN10402595-13-06 |