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最新の波長分散型EPMAの技術の進展<総説 レビュー>
https://doi.org/10.24561/00014887
https://doi.org/10.24561/00014887474f15b9-1645-4166-b030-18b1eea94eb7
名前 / ファイル | ライセンス | アクション |
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KY-AN10402595-20-15.pdf (5.4 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-11-12 | |||||
タイトル | ||||||
タイトル | 最新の波長分散型EPMAの技術の進展<総説 レビュー> | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00014887 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Latest Technology of WDX-EPMA | |||||
著者 |
丹羽, 直昌
× 丹羽, 直昌 |
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著者 ローマ字 | ||||||
NIWA, Naoaki | ||||||
著者 所属 | ||||||
株式会社島津製作所表面半導体事業部技術部応用技術課 | ||||||
著者 所属(別言語) | ||||||
Research & Development Department, Surface Analysis & Semiconductor Equipment Division SHIMADZU CORPORATION | ||||||
書誌情報 |
CACS FORUM 巻 20, p. 87-94, 発行日 2000 |
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年月次 | ||||||
2000-11 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学分析センター | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Several kinds of technologies have been developed for Latest Wavelength Dispersive X-ray spectroscopy EPMA. Especially, new type filament, CeBix is very useful to be used for sub-micron EPMA analysis. This filament is very bright source of electron beam and also is stable for contamination. Another typical technology is Trace Mapping System. This method adopts curved surface simulation technique. With this system, it became possible to mapping analyze almost all kinds of sample, which surface is curved. |
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版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2010-01-06 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AN10402595-20-15 |