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平坦化CMPにおけるパッドドレッシングに関する研究
https://doi.org/10.24561/00016726
https://doi.org/10.24561/000167260cd07638-f4d6-466a-b981-852194b505e7
名前 / ファイル | ライセンス | アクション |
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KY-AA11808968-05-05.pdf (504.8 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2009-05-01 | |||||
タイトル | ||||||
タイトル | 平坦化CMPにおけるパッドドレッシングに関する研究 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pad conditioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CMP | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface treatment | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface reference conditioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | removal rate recovery | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016726 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Study on fundamental pad conditioning mechanism for Chemical Mechanical Polishing | |||||
著者 |
藤田, 隆
× 藤田, 隆× 土肥, 俊郎× 上川, 大地 |
|||||
著者 ローマ字 | ||||||
Fujita, Takashi | ||||||
著者 ローマ字 | ||||||
Doi, Tashiro | ||||||
著者 ローマ字 | ||||||
Kamikawa, Daichi | ||||||
著者 所属 | ||||||
株式会社東京精密 | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属 | ||||||
芝浦工業大学 | ||||||
著者 所属(別言語) | ||||||
Tokyo Seimitsu Co.Ltd | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
著者 所属(別言語) | ||||||
Shibaura Institute of Technology | ||||||
書誌情報 |
埼玉大学地域共同研究センター紀要 en : Report of Cooperative Research Center, Saitama University 巻 5, p. 19-26, 発行日 2005 |
|||||
年月次 | ||||||
2004 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学地域共同研究センター | |||||
出版者名(別言語) | ||||||
出版者 | Cooperative Research Center, Saitama University | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474758 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | The various pad surface treatments were evaluated to clarify dominant factors on a pad surface to get removal rate on CMP(Chemical Mechanical Polishing). On evaluating the dominant surface' factors, pad surface recovery without grinding removal of pad surface was tried using a no-conditioning pad. After eliminating the by-products involved in the pad surface, recovery ratio on removal rate became 31% at most, which indicated that the by-products clogging in the pad surface was not a dominant factor to inhibit removal rate. Not grinding the surface but scraping the surface was valid for effective surface recovery to get removal rate. In this study, a noble pad conditioner was proposed from their results. The developed conditioner, which is the scraping brush conditioner, makes use of deflective deformation in order to apply constant contact force against height variation of pad surface. Consequently, it was demonstrated that the developed conditioner was applicable on surface reference conditioning on CMP without the stick-slip motion that occurs on the traditional conditioner. | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-06-17 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AA11808968-05-05 |