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平坦化CMPにおけるパッドドレッシングに関する研究(第2報)
https://doi.org/10.24561/00016758
https://doi.org/10.24561/00016758c1a92904-ffd3-40a9-a8a5-ac860e3acc5f
名前 / ファイル | ライセンス | アクション |
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KY-AA11808968-06-07.pdf (1.2 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-03-09 | |||||
タイトル | ||||||
タイトル | 平坦化CMPにおけるパッドドレッシングに関する研究(第2報) | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CMP | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | conditioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | bendable fibers | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | efficient conditioning | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | conditioning non-uniformity | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | color variation | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016758 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Study on Fundamental Pad Conditioning Mechanism for Chemical Mechanical Polishing (2nd report) | |||||
著者 |
藤田, 隆
× 藤田, 隆× 土肥, 俊郎× 上川, 大地 |
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著者 ローマ字 | ||||||
Fujita, Takashi | ||||||
著者 ローマ字 | ||||||
Doy, Toshiro | ||||||
著者 ローマ字 | ||||||
Kamikawa, Daichi | ||||||
著者 所属 | ||||||
株式会社東京精密 | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属 | ||||||
芝浦工業大学 | ||||||
著者 所属(別言語) | ||||||
Tokyo Seimitsu Co.Ltd | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
著者 所属(別言語) | ||||||
Shibaura Institute of Technology | ||||||
書誌情報 |
埼玉大学地域共同研究センター紀要 en : Report of Cooperative Research Center, Saitama University 巻 6, p. 24-31, 発行日 2006 |
|||||
年月次 | ||||||
2005 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学総合研究機構地域共同研究センター産学連携推進部門 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474758 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | The novel conditioner was developed for uniform conditioning across a pad. The conditioner is composed by bendable fibers. Therefore, each abrasive conforms independently to the pad surface, differently from the traditional conditioner of plate type. The removal rate using the developed conditioner is equal to that using the traditional conditioner. However, the cut rate of pad using the developed one is tenth part of the cut rate using traditional one. Therefore, it was demonstrated that the developed conditioner realized more efficient conditioning. In addition, in order to evaluate the conditioning non-uniformity effectively, novel uniformity evaluation method was developed. The principle uses color variation by abrading the pad dyed on the surface. As the result, the conditioning non-uniformity was 8.3% with the developed conditioner, compared with 23.8% with the traditional conditioner. | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-03-09 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AA11808968-06-07 |