{"created":"2023-05-15T15:24:08.447991+00:00","id":11235,"links":{},"metadata":{"_buckets":{"deposit":"2daca8f2-35f5-4b47-9037-6d7bd7fe8298"},"_deposit":{"created_by":3,"id":"11235","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"11235"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00011235","sets":["94:427"]},"author_link":["16485"],"item_118_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Appropriate flood intensity analysis to a wetland in old meandering river trace considering the damage by floods and re-growth process of emergent macrophytes"}]},"item_118_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2005","bibliographicIssueDateType":"Issued"},"bibliographicVolumeNumber":"16年度","bibliographic_titles":[{"bibliographic_title":"総合研究機構研究プロジェクト研究成果報告書"}]}]},"item_118_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2007-03-05","subitem_date_issued_type":"Created"}]},"item_118_description_19":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"The rapid recrystallization of amorphous silicon a-Si has been extensively studied using laser annealing, infrared (IR)-lamp heating and rapid thermal annealing (RTA) for further enlargement of the crystalline grain size and improvement of the performance of poly-Si thin film transistors (TFTs) [1-5].\nRecently, the argon microplasma jet at ambient pressure has been applied for the rapid recrystallization of a-Si. Highly crystallized poly-Si films were synthesized up to ~2-μm-thick a-Si films by adjusting the rf power Prf, translating velocity of substrate stage and flow rate of Ar Fr(Ar) [6]. In this paper, we report the rapid recrystallization of a-Si and its related materials such as a-Si(P), a-Si(B), a-SiGe, and a-SiOH using rf microplasma jets of argon at ambient\npressure.","subitem_description_type":"Abstract"}]},"item_118_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_118_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_118_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学総合研究機構"}]},"item_118_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Tanaka, Norio"}]},"item_118_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KP16A04-58"}]},"item_118_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学大学院理工学研究科"}]},"item_118_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Graduate School of Science and Engineering, Saitama University"}]},"item_118_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2005"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"田中, 規夫"},{"creatorName":"タナカ, ノリオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-23"}],"displaytype":"detail","filename":"KP16A04-58.pdf","filesize":[{"value":"171.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KP16A04-58.pdf","url":"https://sucra.repo.nii.ac.jp/record/11235/files/KP16A04-58.pdf"},"version_id":"8fd343bd-7bf2-4f77-b0c9-f5a6ef90ac9b"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"research report","resourceuri":"http://purl.org/coar/resource_type/c_18ws"}]},"item_title":"大型湿地植生の洪水によるダメージと回復過程を考慮した適正洪水導入規模に関する研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"大型湿地植生の洪水によるダメージと回復過程を考慮した適正洪水導入規模に関する研究"}]},"item_type_id":"118","owner":"3","path":["427"],"pubdate":{"attribute_name":"公開日","attribute_value":"2007-03-09"},"publish_date":"2007-03-09","publish_status":"0","recid":"11235","relation_version_is_last":true,"title":["大型湿地植生の洪水によるダメージと回復過程を考慮した適正洪水導入規模に関する研究"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-16T13:54:02.844486+00:00"}