@techreport{oai:sucra.repo.nii.ac.jp:00011367, author = {水野, 毅}, month = {}, note = {5 短期的プロジェクト部門等, text, application/pdf}, title = {革新的超精密除振装置の開発}, year = {2007}, yomi = {ミズノ, タケシ} }