@article{oai:sucra.repo.nii.ac.jp:00012639, author = {小谷, 浩之 and 高崎, 正也 and 石野, 裕二 and 水野, 毅}, issue = {722}, journal = {日本機械学會論文集. C編}, month = {}, note = {Surface acoustic wave (SAW) linear motor is a kind of ultrasonic motors. The SAW linear motor has several advantages, such as thin structure, high thrust force, high velocity and precise positioning. Relationship between applied voltage and output velocity, however, had non-linearity in low velocity range due to friction drive principle. Therefore the SAW linear motor cannot obtain stable driving without feedback control at low velocity. To realize low velocity, PWM (pulse width modulation) control and flexible slider structure are employed. The flexible structure is installed to cancel vibration due to PWM carrier frequency. In this research, PWM is applied for controlling the slider velocity. Lower velocity in non-linear range is realized. Influence of the flexible structure upon precise positioning is investigated., text, application/pdf}, pages = {3236--3241}, title = {PWMを用いた弾性表面波リニアモータの速度制御(機械力学,計測,自動制御)}, volume = {72}, year = {2006}, yomi = {コタニ, ヒロユキ and タカサキ, マサヤ and イシノ, ユウジ and ミズノ, タケシ} }