@article{oai:sucra.repo.nii.ac.jp:00012730,
 author = {荒居, 善雄 and 轟, 章 and 小林, 英男 and 中村, 春夫 and 朴, 位坤 and 飯田, 英徳},
 issue = {568},
 journal = {日本機械学會論文集. A編},
 month = {},
 note = {Measuring elastic properties of thin film on substrates is important in the analysis of residual stresses of advanced 3D LSI. In this study, an approach to for nondestructive measurement of the elastic properties of thin film on the substrate nondestructively with a scanning acoustic microscope is proposed. The approach was analyzed mathematically and was applied to aluminum film on glass substrates. As a result, this approach was proved to be excellent for the objective, and the elastic modulus of aluminum film on the glass substrate was 10% smaller than that of the bulk data., text, application/pdf},
 pages = {2977--2983},
 title = {超音波顕微鏡による薄膜弾性係数測定手法の検討},
 volume = {59},
 year = {1993},
 yomi = {アライ, ヨシオ and トドロキ, アキラ and コバヤシ, ヒデオ and ナカムラ, ハルオ and Park, Wigon and イイダ, ヒデノリ}
}