{"created":"2023-05-15T15:25:11.875362+00:00","id":12730,"links":{},"metadata":{"_buckets":{"deposit":"27d5f6d1-ddc3-4c1f-a0a0-f93692736de3"},"_deposit":{"created_by":3,"id":"12730","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"12730"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00012730","sets":["94:426"]},"author_link":["16491","19913","19914","19915","19911","19912"],"item_119_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Approach for Measuring Elastic Modulus of Thin Film by Scanning Acoustic Microscope"}]},"item_119_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1993","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"568","bibliographicPageEnd":"2983","bibliographicPageStart":"2977","bibliographicVolumeNumber":"59","bibliographic_titles":[{"bibliographic_title":"日本機械学會論文集. A編"}]}]},"item_119_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2007-03-05","subitem_date_issued_type":"Created"}]},"item_119_description_19":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"Measuring elastic properties of thin film on substrates is important in the analysis of residual stresses of advanced 3D LSI. In this study, an approach to for nondestructive measurement of the elastic properties of thin film on the substrate nondestructively with a scanning acoustic microscope is proposed. The approach was analyzed mathematically and was applied to aluminum film on glass substrates. As a result, this approach was proved to be excellent for the objective, and the elastic modulus of aluminum film on the glass substrate was 10% smaller than that of the bulk data.","subitem_description_type":"Abstract"}]},"item_119_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_119_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_119_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"社団法人日本機械学会"}]},"item_119_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03875008","subitem_source_identifier_type":"ISSN"}]},"item_119_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Arai, Yoshio"},{"subitem_text_value":"Todoroki, Akira"},{"subitem_text_value":"Kobayashi, Hideo"},{"subitem_text_value":"Nakamura, Haruo"},{"subitem_text_value":"Park, Wigon"},{"subitem_text_value":"Iida, Hidenori"}]},"item_119_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"A3000149"}]},"item_119_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学大学院理工学研究科"}]},"item_119_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Graduate School of Science and Engineering, Saitama University"}]},"item_119_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"1993-12"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"荒居, 善雄"},{"creatorName":"アライ, ヨシオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"轟, 章"},{"creatorName":"トドロキ, アキラ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"小林, 英男"},{"creatorName":"コバヤシ, ヒデオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"中村, 春夫"},{"creatorName":"ナカムラ, ハルオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"朴, 位坤"},{"creatorName":"Park, Wigon","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"飯田, 英徳"},{"creatorName":"イイダ, ヒデノリ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"A3000149.pdf","filesize":[{"value":"530.6 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"A3000149.pdf","url":"https://sucra.repo.nii.ac.jp/record/12730/files/A3000149.pdf"},"version_id":"44a58ea0-6a4e-4d67-a573-5487c07ea9f3"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Elasticity","subitem_subject_scheme":"Other"},{"subitem_subject":"Material Testing","subitem_subject_scheme":"Other"},{"subitem_subject":"Nondestructive Inspection","subitem_subject_scheme":"Other"},{"subitem_subject":"Ultrasonic","subitem_subject_scheme":"Other"},{"subitem_subject":"Thin Film","subitem_subject_scheme":"Other"},{"subitem_subject":"Substrate","subitem_subject_scheme":"Other"},{"subitem_subject":"Scanning Acoustic Microcope","subitem_subject_scheme":"Other"},{"subitem_subject":"LSI","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"超音波顕微鏡による薄膜弾性係数測定手法の検討","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"超音波顕微鏡による薄膜弾性係数測定手法の検討"}]},"item_type_id":"119","owner":"3","path":["426"],"pubdate":{"attribute_name":"公開日","attribute_value":"2007-09-11"},"publish_date":"2007-09-11","publish_status":"0","recid":"12730","relation_version_is_last":true,"title":["超音波顕微鏡による薄膜弾性係数測定手法の検討"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-16T12:53:23.532821+00:00"}