{"created":"2023-05-15T15:25:20.056507+00:00","id":12924,"links":{},"metadata":{"_buckets":{"deposit":"5b93e2bf-f1c8-4955-a885-8cc95c417c79"},"_deposit":{"created_by":3,"id":"12924","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"12924"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00012924","sets":["94:426"]},"author_link":["20381","20380","20379","16573"],"item_119_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"&EMPTY&"},{"subitem_alternative_title":"Substrate Temperature and Post-Annealing Effects on Perpendicular Anisotropy of Ba-Ferrite Films with Excess Iron Ions"}]},"item_119_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1994","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"12","bibliographicPageEnd":"554","bibliographicPageStart":"547","bibliographicVolumeNumber":"J77-C2","bibliographic_titles":[{"bibliographic_title":"電子情報通信学会論文誌. C-II, エレクトロニクス, II-電子素子・応用"}]}]},"item_119_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2007-10-05","subitem_date_issued_type":"Created"}]},"item_119_description_17":{"attribute_name":"関連サイト","attribute_value_mlt":[{"subitem_description":"http://www.ieice.org/jpn/trans_online/index.html | http://www.ieice.org/jpn/trans_online/index.html","subitem_description_type":"Other"}]},"item_119_description_19":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"RFマグネロトンスパッタ法によりバリウムフェライト薄膜を作製すると,膜中のFe/Ba原子比が15〜16のとき,基板温度(T_s)の相違によりc軸が膜面垂直方向に配向した膜,c軸が膜面内に配向した膜およびc軸が等方的な膜がそれぞれ得られた.そこで,それらの結晶配向の異なる原因を熱処理過程における薄膜の結晶相および構造を詳細に調べることにより検討した.T_s=RTで作製した熱処理前の膜は膜中のFe^<2+>の存在量が多く,かつ無秩序に存在した.この膜を熱処理すると,膜中への酸素の拡散が促進され,フェライト化反応が低温から開始したが,c軸が膜面内に配向した膜になった.T_sが高くなるに従い,膜中のFe^<2+>の存在量は減少し,{110}Fe_xOが結晶化した.この膜を熱処理すると,低温からFe^<3+>が混在するため,バリウムフェライト生成開始温度が高くなり,c軸が等方的な膜が得られた.T_s=750℃で成膜すると,成膜時に{111}Fe_xOが生成しており,それが熱処理過程で過渡的にFe_3O_4に変化し,更にバリウムフェライト中に固溶してc軸が膜面垂直方向に配向した膜が得られた.","subitem_description_type":"Abstract"}]},"item_119_description_21":{"attribute_name":"注記","attribute_value_mlt":[{"subitem_description":"copyright(c)1994 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