{"created":"2023-05-15T15:26:01.756619+00:00","id":13880,"links":{},"metadata":{"_buckets":{"deposit":"9b11bcf3-17ce-412a-8c17-26ba22f66007"},"_deposit":{"created_by":3,"id":"13880","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"13880"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00013880","sets":["96:641"]},"author_link":["23349","23350","23348"],"item_119_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"A Horizontal Relative Displacement Control of Precision Machines Using Vertical Actuators"}]},"item_119_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1998","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"625","bibliographicPageEnd":"3419","bibliographicPageStart":"3414","bibliographicVolumeNumber":"64","bibliographic_titles":[{"bibliographic_title":"日本機械学會論文集. C編"}]}]},"item_119_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-09-11","subitem_date_issued_type":"Created"}]},"item_119_description_19":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"This paper describes all active vibration control system which controls horizontal relative displacement using vertical actuators. In precision machines, it is essential to reduce the horizontal relative displacement between two important elements e.g. an object glass and the specimen table of a scanning electron microscope. The vibration control system is composed of passive devices with springs and dampers, and vertical actuators arranged parallel to the passive devices. In an experiment, a machine model on a base and the active vibration control system were modeled after two masses and four degrees-of-freedom, and vertical actuators were controlled by state feedback and a Kalman filter with respect to floor vibrations. An experiment for controlling the horizontal relative displacement of a machine model through vertical actuators was done, so that effectiveness of the active vibration control system could be verified.","subitem_description_type":"Abstract"}]},"item_119_description_21":{"attribute_name":"注記","attribute_value_mlt":[{"subitem_description":"rights: 社団法人日本機械学会\nrights: 本文データは学協会の許諾に基づきCiNiiから複製したものである\nrelation: IsVersionOf: http://ci.nii.ac.jp/naid/110002383983/","subitem_description_type":"Other"}]},"item_119_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_119_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_119_other_language_22":{"attribute_name":"その他の言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_119_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"社団法人日本機械学会"}]},"item_119_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"03875024","subitem_source_identifier_type":"ISSN"}]},"item_119_text_27":{"attribute_name":"版","attribute_value_mlt":[{"subitem_text_value":"[出版社版]"}]},"item_119_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"TANAKA, Kihachirou"},{"subitem_text_value":"KURIHARA, Masaki"},{"subitem_text_value":"ISOTANI, Hitoshi"}]},"item_119_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"A3000092"}]},"item_119_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"(株)日立製作所機械研究所"},{"subitem_text_value":"(株)日立製作所機械研究所"},{"subitem_text_value":"(株)日立製作所機械研究所(現 : 埼玉大学工学部)"}]},"item_119_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"&EMPTY&"},{"subitem_text_value":"&EMPTY&"},{"subitem_text_value":"Department of Mechanical Engineering, Saitama University"}]},"item_119_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"1998-09"}]},"item_119_version_type_28":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"田中, 基八郎"},{"creatorName":"タナカ, キハチロウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"栗原, 雅樹"},{"creatorName":"クリハラ, マサキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"礒谷, 仁"},{"creatorName":"イソタニ, ヒトシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"A3000092.pdf","filesize":[{"value":"592.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"A3000092.pdf","url":"https://sucra.repo.nii.ac.jp/record/13880/files/A3000092.pdf"},"version_id":"45681622-528b-4479-8076-f776d569635a"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Active Vibration Control","subitem_subject_scheme":"Other"},{"subitem_subject":"Piezoelectric Actuator","subitem_subject_scheme":"Other"},{"subitem_subject":"Optimal Regulator","subitem_subject_scheme":"Other"},{"subitem_subject":"Kalman Filter","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"上下アクチュエータを用いた精密機器の水平相対変位制御","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"上下アクチュエータを用いた精密機器の水平相対変位制御"}]},"item_type_id":"119","owner":"3","path":["641"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-09-11"},"publish_date":"2009-09-11","publish_status":"0","recid":"13880","relation_version_is_last":true,"title":["上下アクチュエータを用いた精密機器の水平相対変位制御"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-16T12:21:03.437610+00:00"}