{"created":"2023-05-15T15:26:40.167938+00:00","id":14763,"links":{},"metadata":{"_buckets":{"deposit":"665c7853-9406-4c12-b616-8fb02ae0c398"},"_deposit":{"created_by":3,"id":"14763","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"14763"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00014763","sets":["95:240:496:484"]},"author_link":["25053","16494","25054"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Semiconductor Micro Oxygen Sensor Workable at Room Temperature."}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1991","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"20","bibliographicPageStart":"17","bibliographicVolumeNumber":"11","bibliographic_titles":[{"bibliographic_title":"CACS FORUM"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2010-01-13","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"A sputtered LaF3 film was applied to construct a semiconductor micro-oxygen sensor consisting of a Pt/LaF3/SiO2/n-Si/Al structure. The sensor showed a stable response in the oxygen partial pressure range of 0.1-1.0 atm at ambient temperature. The sensitivity and response time strongly depended on the fabrication conditions of LaF3 and Pt films, and the optimum sputtering conditions to prepare the films were investigated. The highly sensitive sensor element was obtained at a relatively high deposition rate (15nm/min)of LaF3 film and at a high Ar pressure of 10.7Pa. It was shown from ESCA analysis that the higher sensitivity was attained by the higher[F]/[La]ratio[x]of the LaFx film.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00014757","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学分析センター"}]},"item_120_text_27":{"attribute_name":"版","attribute_value_mlt":[{"subitem_text_value":"[出版社版]"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"KATSUBE, Teruaki"},{"subitem_text_value":"HARA, Masashi"},{"subitem_text_value":"UCHIDA, Hidekazu"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AN10402595-11-04"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学工学部情報工学科"},{"subitem_text_value":"埼玉大学工学部情報工学科"},{"subitem_text_value":"埼玉大学工学部情報工学科"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Department of Information and Computer Science, Faculty of Engineerinｇ, Saitama University"},{"subitem_text_value":"Department of Information and Computer Science, Faculty of Engineerinｇ, Saitama University"},{"subitem_text_value":"Department of Information and Computer Science, Faculty of Engineerinｇ, S"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"1991-11"}]},"item_120_version_type_28":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"勝部, 昭明"},{"creatorName":"カツベ, テルアキ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"原, 正史"},{"creatorName":"ハラ, マサシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"内田, 秀和"},{"creatorName":"ウチダ, ヒデカズ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AN10402595-11-04.pdf","filesize":[{"value":"209.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AN10402595-11-04.pdf","url":"https://sucra.repo.nii.ac.jp/record/14763/files/KY-AN10402595-11-04.pdf"},"version_id":"4ec8823e-c5e4-4af6-a117-17329473a954"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"常温で作動する半導体マイクロ酸素センサー<ミニノート>","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"常温で作動する半導体マイクロ酸素センサー<ミニノート>"}]},"item_type_id":"120","owner":"3","path":["484"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-11-12"},"publish_date":"2009-11-12","publish_status":"0","recid":"14763","relation_version_is_last":true,"title":["常温で作動する半導体マイクロ酸素センサー<ミニノート>"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T17:53:26.639236+00:00"}