@article{oai:sucra.repo.nii.ac.jp:00014775, author = {河西, 敏雄}, journal = {CACS FORUM}, month = {}, note = {In this progressive age, a high level mirror finishing method, that is the ultraprecision polishing plays an important role in fabricating the newest optomechatronic devices, together with a surface roughness measuring method for very fine ups and downs of finished surface with such polishing. Then, actual situations of such polishing and measuring technologies are described. An historcal account of polishing method is also given, and a comparison between surface roughness measuring instruments having the stylus detector and the optical detector is carried out., text, application/pdf}, pages = {23--27}, title = {高度の鏡面研磨とその表面粗さの測定<ミニノート>}, volume = {12}, year = {1992}, yomi = {カサイ, トシオ} }