{"created":"2023-05-15T15:26:41.156626+00:00","id":14786,"links":{},"metadata":{"_buckets":{"deposit":"0d9c19b1-e542-456d-aa12-937ee61d6884"},"_deposit":{"created_by":3,"id":"14786","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"14786"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00014786","sets":["95:240:496:486"]},"author_link":["25073","25074","25075"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Preparation of Metaland Oxide Thin Films by Means  of CVD method Using Volatile Complexes"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"1993","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"25","bibliographicPageStart":"22","bibliographicVolumeNumber":"13","bibliographic_titles":[{"bibliographic_title":"CACS FORUM"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2010-01-14","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"A novel CVD system has been examined to deposit metal complex compounds over catalytically active substrate surfaces in flowing gases at ambient pressure. Thus, metallic thin films of Fe, Co and Cu were obtained on Ni substrate in a flowing hydrogen, whereas metal oxide films of these metals were obtained in a flowing oxygen. It is able to controll the chemical composition of the resulting film by changing the flowing gas. In addition a gradient film of Cu, which changed its chemical composition gradually from metal to Cu oxide, was obtained by changing the composition of flowing gas gradually from argon to oxygen. Such a film suggested high torelance against thermal shock.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00014780","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学分析センター"}]},"item_120_text_27":{"attribute_name":"版","attribute_value_mlt":[{"subitem_text_value":"[出版社版]"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"MIURA, Hiroshi"},{"subitem_text_value":"HIGUCHI, Hiroshi"},{"subitem_text_value":"ITO, Kanta"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AN10402595-13-06"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学工学部応用化学科"},{"subitem_text_value":"埼玉大学工学部応用化学科"},{"subitem_text_value":"埼玉大学工学部応用化学科"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Department of Applled Chemistry, Faculty of Engineering, Saitama University"},{"subitem_text_value":"Department of Applled Chemistry, Faculty of Engineering, Saitama UniversityDepartment of Applled Chemistry, Faculty of Engineering, Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"1993-12"}]},"item_120_version_type_28":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"三浦, 弘"},{"creatorName":"ミウラ, ヒロシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"樋口, 博士"},{"creatorName":"ヒグチ, ヒロシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"伊藤, 寛太"},{"creatorName":"イトウ, カンタ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AN10402595-13-06.pdf","filesize":[{"value":"162.2 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AN10402595-13-06.pdf","url":"https://sucra.repo.nii.ac.jp/record/14786/files/KY-AN10402595-13-06.pdf"},"version_id":"a337d583-bae9-4262-9ee9-a3dce6207af8"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"昇華性錯体を利用したCVD法による金属薄膜および酸化物薄膜の調製<ミニノート>","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"昇華性錯体を利用したCVD法による金属薄膜および酸化物薄膜の調製<ミニノート>"}]},"item_type_id":"120","owner":"3","path":["486"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-11-12"},"publish_date":"2009-11-12","publish_status":"0","recid":"14786","relation_version_is_last":true,"title":["昇華性錯体を利用したCVD法による金属薄膜および酸化物薄膜の調製<ミニノート>"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T17:52:29.040624+00:00"}