@article{oai:sucra.repo.nii.ac.jp:00014797,
 author = {勝部, 昭明 and 清水, 正章 and 内田, 秀和},
 journal = {CACS FORUM},
 month = {},
 note = {This report is the survey of our research results on a solis state chemical sensor fabricated by a micro-electronic technology. This report is the survev of our research results on a solis state chemical sensor fabricated by a micro-electronic technology. Characteristics of three different type solid sensors, i.e., thin film pH sensor, FET type oxygen sensor and SPV(surface photo voltage) bio(enzyme) sensor, are described by clarifying the correlation between film structure and sensor response. It was first shown that IrOx and LaF3 films were successfully used to fabricate the thin film type pH sensor and FET type oxygen sensor, respectively. The enzyme immobilization was done using water soluble photo-crosslinkable polymer. It was then clarified that the strict control of both of the film morphology and crystal structure of the sensing film is essencially important to achieve the sufficient stability of sensor response. It was also demonstrated that the SPV sensor is a promising candidate to develope the highly integratdd chemical sensor which has not been expected using the conventional micro sensors., text, application/pdf},
 pages = {3--10},
 title = {マイクロエレクトロニクス技術を用いた集積化化学センサー<総説 マイレビュー>},
 volume = {14},
 year = {1994},
 yomi = {カツベ, テルアキ and シミズ, マサアキ and ウチダ, ヒデカズ}
}