@article{oai:sucra.repo.nii.ac.jp:00014893, author = {丹羽, 直昌}, journal = {CACS FORUM}, month = {}, note = {Several kinds of technologies have been developed for Latest Wavelength Dispersive X-ray spectroscopy EPMA. Especially, new type filament, CeBix is very useful to be used for sub-micron EPMA analysis. This filament is very bright source of electron beam and also is stable for contamination. Another typical technology is Trace Mapping System. This method adopts curved surface simulation technique. With this system, it became possible to mapping analyze almost all kinds of sample, which surface is curved., text, application/pdf}, pages = {87--94}, title = {最新の波長分散型EPMAの技術の進展<総説 レビュー>}, volume = {20}, year = {2000}, yomi = {ニワ, ナオアキ} }