{"created":"2023-05-15T15:26:45.990085+00:00","id":14898,"links":{},"metadata":{"_buckets":{"deposit":"921cc647-7ad8-49a4-8c6f-043f954a67eb"},"_deposit":{"created_by":3,"id":"14898","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"14898"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00014898","sets":["95:240:496:493"]},"author_link":["25183"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Introductions of Existing Scanning Electron Microscopes (S-4100, S-2400) in CACS and Recent Topics in the SEM Technique"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2000","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"132","bibliographicPageStart":"125","bibliographicVolumeNumber":"20","bibliographic_titles":[{"bibliographic_title":"CACS FORUM"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2010-01-07","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"埼玉大学分析センターでは，1993 年に2 台のSEM(S-2400，S-4100)を導入し多くの研究をサポートしてきた．ここでは周辺装置も含めたこれらのSEM の特長，機能，応用範囲などについて述べ，今後の更なる活用の一助としたい．また，SEM 技術に関する最近の話題として，その高分解能化に対する技術的な取り組み，SEM コンピューター制御化のメリット，低真空SEM の現状と応用例を掲げる．\nThe SEMs(S-2400 and S-4100) in CACS have supported a lot of researches since those were installed in 1993. Features, functions and the scope of applications of the SEMs are described here including some peripheral apparatus for promotion of further use. In addition,some technical approaches to higher resolution, advantages of the computer controlled SEM and present state of the low vacuum SEM and applications are also introduced as recent topics concerning SEM technology.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00014892","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学分析センター"}]},"item_120_text_27":{"attribute_name":"版","attribute_value_mlt":[{"subitem_text_value":"[出版社版]"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"YAMADA, Mitsuhiko"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AN10402595-20-20"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"(株)日立サイエンスシステムズテクノリサーチセンター"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Techno Research Laboratory, Hitachi Science Systems Ltd."}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2000-11"}]},"item_120_version_type_28":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"山田, 満彦"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AN10402595-20-20.pdf","filesize":[{"value":"922.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AN10402595-20-20.pdf","url":"https://sucra.repo.nii.ac.jp/record/14898/files/KY-AN10402595-20-20.pdf"},"version_id":"bbfd1eb5-de65-413c-8949-f3524d1aa6a3"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"SEM(S-4100，S-2400形)の紹介と最近のSEM技術について<総説 レビュー>","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"SEM(S-4100，S-2400形)の紹介と最近のSEM技術について<総説 レビュー>"}]},"item_type_id":"120","owner":"3","path":["493"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-11-12"},"publish_date":"2009-11-12","publish_status":"0","recid":"14898","relation_version_is_last":true,"title":["SEM(S-4100，S-2400形)の紹介と最近のSEM技術について<総説 レビュー>"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-05-15T17:48:47.364908+00:00"}