{"created":"2023-05-15T15:27:36.366838+00:00","id":16477,"links":{},"metadata":{"_buckets":{"deposit":"ac9e7a39-fcc8-430a-8e41-96429262ad85"},"_deposit":{"created_by":3,"id":"16477","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16477"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016477","sets":["95:238:630"]},"author_link":["26678","26677","26680","16572","26679"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Real Time Diagnostics of the Crystallization of Amorphous Silicon Utilizing a RF Thermal Plasma Torch"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2009","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"48","bibliographicPageStart":"41","bibliographicVolumeNumber":"1","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域オープンイノベーションセンター紀要"},{"bibliographic_title":"Report of Comprehensive Open Innovation Center, Saitama University","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-08-18","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"Crystallization mechanism of hydrogenated amorphous silicon (a-Si:H) by using the atmospheric pressure radio-frequency thermal plasma jet (AP-TPJ) is discussed through the real time monitoring of the surface temperature, optical transmittance, and reflectance profiles. The film crystallization proceeds through the three steps, i.e., dehydrogenation, solid phase crystallization (SPC) and subsequent coalescence of small crystalline grains. The SPC occurs at 750°C, which was almost independent of the rising speed of surface temperature. However, the coalescence stage depended on the surface temperature profile and the maximum surface temperature, which determined the average crystalline grain size.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016471","subitem_identifier_reg_type":"JaLC"}]},"item_120_other_language_22":{"attribute_name":"その他の言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学総合研究機構地域オープンイノベーションセンター"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"18838278","subitem_source_identifier_type":"ISSN"}]},"item_120_text_27":{"attribute_name":"版","attribute_value_mlt":[{"subitem_text_value":"[出版社版]"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Ohta, Naoki"},{"subitem_text_value":"Haruta, Koji"},{"subitem_text_value":"Shimizu, Hirokazu"},{"subitem_text_value":"Kobayashi, Tomohiro"},{"subitem_text_value":"Shirai, Hajime"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-18838278-15"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学大学院理工学研究科"},{"subitem_text_value":"埼玉大学大学院理工学研究科"},{"subitem_text_value":"埼玉県産業技術総合センター"},{"subitem_text_value":"理化学研究所"},{"subitem_text_value":"埼玉大学大学院理工学研究科"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"The Graduate School of Science and Engineering, Saitama University"},{"subitem_text_value":"The Graduate School of Science and Engineering, Saitama University"},{"subitem_text_value":"Saitama Industrial Technology Center (SAITEC)"},{"subitem_text_value":"The Institute of Physical and Chemical Research (RIKEN)"},{"subitem_text_value":"The Graduate School of Science and Engineering, Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2008"}]},"item_120_version_type_28":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"太田, 直希"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"春田, 浩司"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"清水, 宏一"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"小林, 知洋"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"白井, 肇"},{"creatorName":"シライ, ハジメ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-18838278-15.pdf","filesize":[{"value":"4.7 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-18838278-15.pdf","url":"https://sucra.repo.nii.ac.jp/record/16477/files/KY-18838278-15.pdf"},"version_id":"d29db735-885b-4e8b-b27f-83c7ca2a2d72"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"大気圧熱プラズマジェットによる a-Si 相変化の実時間計測","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"大気圧熱プラズマジェットによる a-Si 相変化の実時間計測"}]},"item_type_id":"120","owner":"3","path":["630"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-08-18"},"publish_date":"2009-08-18","publish_status":"0","recid":"16477","relation_version_is_last":true,"title":["大気圧熱プラズマジェットによる a-Si 相変化の実時間計測"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T18:05:48.228420+00:00"}