{"created":"2023-05-15T15:27:40.281674+00:00","id":16570,"links":{},"metadata":{"_buckets":{"deposit":"bf19f683-dd12-4eb1-94b4-63d9ae5444c7"},"_deposit":{"created_by":3,"id":"16570","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16570"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016570","sets":["95:239:633"]},"author_link":["26935","26934","26933"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Study of Drum Type Polishing Technology : Investigation of correlation between calculated polishing profile and actual polishing profile at each staying position of polishing drum"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2001","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"7","bibliographicPageStart":"3","bibliographicVolumeNumber":"1","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域共同研究センター紀要"},{"bibliographic_title":"Report of Cooperative Research Center, Saitama University","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-06-25","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"次世代CMP(Chemical Mechanical Polishing)装置に対応する研磨方式として、線接触ポリッシング装置の開発を進めている。線接触ポリッシング方法では、連続的な線接触状態の重ね合わせにより研磨が進行し、ウェハに対するドラムの揺動条件を設定することで研磨形状を制御することが可能になる。通常の面接触研磨装置と比べ、研磨部へのスラリー搬送性やウェハーパッド接触状態制御の点で、研磨各部位における研磨状態を精度良く設定することが可能となり、極めて均一な研磨加工が実現できるものと期待されている。\n本研究では、この線接触ポリッシング方式に対し、厳密な揺動評価の前段階としてウェハに対する各ドラム定在位置における研磨形状に関し、理論形状と実際の研磨形状との比較を行った。その結果、ドラムのウェハに対する接触状態を考慮して得た理論形状は実際に得られた研磨形状とほぼ一致し、均一な線接触状態の下で適正な揺動条件を選択することで、均一研磨実現への可能性を見い出した。","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016564","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学地域共同研究センター"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474758","subitem_source_identifier_type":"ISSN"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Takashi Fujita"},{"subitem_text_value":"Katsuyoshi, Aikawa"},{"subitem_text_value":"Toshiro Doy"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AA11808968-01-02"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"(株)東京精密"},{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"埼玉大学教育学部"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Tokyo Seimitsu Co. Ltd."},{"subitem_text_value":"Saitama University"},{"subitem_text_value":"Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2000"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"藤田, 隆"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"相川, 勝芳"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"土肥, 俊郎"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AA11808968-01-02.pdf","filesize":[{"value":"376.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AA11808968-01-02.pdf","url":"https://sucra.repo.nii.ac.jp/record/16570/files/KY-AA11808968-01-02.pdf"},"version_id":"4f283131-89f8-42e2-bb65-4ba3dc8e4305"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"ドラム式線接触ポリッシング法の研究 :  ドラム定在位置における理論形状と実研磨形状の比較検討 (超精密加工技術の応用に関する研究) <研究報告>","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"ドラム式線接触ポリッシング法の研究 :  ドラム定在位置における理論形状と実研磨形状の比較検討 (超精密加工技術の応用に関する研究) <研究報告>"}]},"item_type_id":"120","owner":"3","path":["633"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-06-12"},"publish_date":"2009-06-12","publish_status":"0","recid":"16570","relation_version_is_last":true,"title":["ドラム式線接触ポリッシング法の研究 :  ドラム定在位置における理論形状と実研磨形状の比較検討 (超精密加工技術の応用に関する研究) <研究報告>"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T18:16:42.053994+00:00"}