@article{oai:sucra.repo.nii.ac.jp:00016651,
 author = {村松, 享 and 土肥, 俊郎 and 谷津, 和子},
 journal = {埼玉大学地域共同研究センター紀要, Report of Cooperative Research Center, Saitama University},
 month = {},
 note = {text, application/pdf},
 pages = {29--29},
 title = {ポリウレタン樹脂を用いたCMPパッドの初期評価},
 volume = {3},
 year = {2003}
}