@article{oai:sucra.repo.nii.ac.jp:00016652,
 author = {河野, 恭幸 and 土肥, 俊郎 and 瀬山, 貴司 and 渡辺, 茂},
 journal = {埼玉大学地域共同研究センター紀要, Report of Cooperative Research Center, Saitama University},
 month = {},
 note = {text, application/pdf},
 pages = {30--30},
 title = {エポキシ系樹脂を用いたCMP用パッドの試作とその加工特性2},
 volume = {3},
 year = {2003}
}