{"created":"2023-05-15T15:27:45.348213+00:00","id":16688,"links":{},"metadata":{"_buckets":{"deposit":"f4a19e29-8257-4fec-b9b8-5e085589b7cb"},"_deposit":{"created_by":3,"id":"16688","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16688"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016688","sets":["95:239:636"]},"author_link":["27244","27246","27245","27248","27247","27243"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Effects of Slanted Cross-Sectional Shapes of Pad Grooves on CMP Characteristics"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2004","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"4","bibliographicPageStart":"1","bibliographicVolumeNumber":"4","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域共同研究センター紀要"},{"bibliographic_title":"Report of Cooperative Research Center, Saitama Univerity","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-06-17","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"In CMP (Chemical Mechanical Polishing) characteristics, the shapes of grooves formed on pad surface affect greatly on removal rate, non-uniformity within wafer surface and slurry flow rate. They allow the slurry flow toward the center or outside of the pad when the pad is rotating. In this study, how 7 different slanted grooves on the pad surface affect the removal rate and slurry flow rate were examined. As a result, different and unique characteristics were observed. These slanted groove pads may make it possible to improve polishing performances such as removal rate and reducing the amount of slurry to be used.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016682","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学地域共同研究センター"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474758","subitem_source_identifier_type":"ISSN"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"HORIGUCHI, Fumie"},{"subitem_text_value":"DOI, Toshiro"},{"subitem_text_value":"HORIMOTO, Suguru"},{"subitem_text_value":"SUZUKI, Tatsutoshi"},{"subitem_text_value":"SEYAMA, Takahshi"},{"subitem_text_value":"FUNAKOSHI, Takao"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AA11808968-04-01"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"埼玉大学教育学部 ; (株)D-Process"},{"subitem_text_value":"東邦エンジニアリング株式会社"},{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"埼玉大学教育学部"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Saitama University"},{"subitem_text_value":"Saitama University"},{"subitem_text_value":"Saitama University ; D-Process lnc."},{"subitem_text_value":"Toho Engineering Co., Ltd"},{"subitem_text_value":"Saitama University"},{"subitem_text_value":"Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2003"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"堀口, 文江"},{"creatorName":"ホリグチ, フミエ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"土肥, 俊郎"},{"creatorName":"ドイ, トシロウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"堀本, 卓"},{"creatorName":"ホリモト, スグル","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"鈴木, 辰俊"},{"creatorName":"スズキ, タツトシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"瀬山, 貴司"},{"creatorName":"セヤマ, タカシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"船越, 考雄"},{"creatorName":"フナコシ, タカオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AA11808968-04-01.pdf","filesize":[{"value":"325.1 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AA11808968-04-01.pdf","url":"https://sucra.repo.nii.ac.jp/record/16688/files/KY-AA11808968-04-01.pdf"},"version_id":"dada4c04-31a5-4a16-b12c-6f2b34e59ea0"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"CMP(Chemical Mechanical polishing)","subitem_subject_scheme":"Other"},{"subitem_subject":"slanted grooves","subitem_subject_scheme":"Other"},{"subitem_subject":"pads","subitem_subject_scheme":"Other"},{"subitem_subject":"removal rate","subitem_subject_scheme":"Other"},{"subitem_subject":"uniformity","subitem_subject_scheme":"Other"},{"subitem_subject":"slurry","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"CMP特性に及ぼすパッド溝断面の傾斜角の影響","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"CMP特性に及ぼすパッド溝断面の傾斜角の影響"}]},"item_type_id":"120","owner":"3","path":["636"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-05-14"},"publish_date":"2009-05-14","publish_status":"0","recid":"16688","relation_version_is_last":true,"title":["CMP特性に及ぼすパッド溝断面の傾斜角の影響"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T18:11:51.096352+00:00"}