{"created":"2023-05-15T15:27:47.033936+00:00","id":16728,"links":{},"metadata":{"_buckets":{"deposit":"71cb43a7-1a90-4e3f-ac47-9d6978fbebae"},"_deposit":{"created_by":3,"id":"16728","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16728"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016728","sets":["95:239:637"]},"author_link":["27358","27357","27356","27355"],"item_120_alternative_title_1":{"attribute_name":"タイトル(別言語)","attribute_value_mlt":[{"subitem_alternative_title":"Study on the Advanced Polishing Technology for Silicon Carbide Single Crystal"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2005","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"3","bibliographicPageStart":"1","bibliographicVolumeNumber":"5","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域共同研究センター紀要"},{"bibliographic_title":"Report of Cooperative Research Center, Saitama University","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-06-17","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"We developed the advanced chemo-mechanical pol ishing (CMP) technologies for Silicon Carbide (SiC) single crystal. In O2 atmosphere, we got the enough pol ishing rate on Si surface of 4H-SiC crystal. And we also got the enough pol ishing rate on same surface by adding H2O2\nSiC半導体は有利な物性を持ち、次世代のデバイスとして注目されている。しかしSiCは難加工物質であり、従来のCMP加工条件のままでは加工が困難である。そこで本研究では試作したBell-Jar型CMP装置を用い、加工雰囲気を調整し、従来とは異なるアプローチで高品位かつ効率的なSiCのCMP加工を検討した。また、上記結果を大気中でのCMPに応用できるかどうかを検討した。","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016722","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学地域共同研究センター"}]},"item_120_publisher_12":{"attribute_name":"出版者名(別言語)","attribute_value_mlt":[{"subitem_publisher":"Cooperative Research Center, Saitama University"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474758","subitem_source_identifier_type":"ISSN"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AA11808968-05-01"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"秩父エレクトロン株式会社"},{"subitem_text_value":"埼玉大学教育学部機械技術研究室"},{"subitem_text_value":"埼玉大学教育学部機械技術研究室"},{"subitem_text_value":"埼玉大学教育学部機械技術研究室"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Chichibu-Electron Corporation"},{"subitem_text_value":"Mechanical Engineering Lab., Faculty of Education, Saitama University"},{"subitem_text_value":"Mechanical Engineering Lab., Faculty of Education, Saitama University"},{"subitem_text_value":"Mechanical Engineering Lab., Faculty of Education, Saitama University"},{"subitem_text_value":"Mechanical Engineering Lab., Faculty of Education, Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2004"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"中原, 良彦"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"土肥, 俊郎"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"瀬山, 貴司"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"尾形, 謙次郎"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AA11808968-05-01.pdf","filesize":[{"value":"191.3 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AA11808968-05-01.pdf","url":"https://sucra.repo.nii.ac.jp/record/16728/files/KY-AA11808968-05-01.pdf"},"version_id":"f02b13c2-bf6a-4661-9552-26e49ce3e1dd"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"SiC単結晶の研磨加工技術に関する基礎研究","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"SiC単結晶の研磨加工技術に関する基礎研究"}]},"item_type_id":"120","owner":"3","path":["637"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-05-01"},"publish_date":"2009-05-01","publish_status":"0","recid":"16728","relation_version_is_last":true,"title":["SiC単結晶の研磨加工技術に関する基礎研究"],"weko_creator_id":"3","weko_shared_id":3},"updated":"2023-05-15T18:10:34.155119+00:00"}