{"created":"2023-05-15T15:27:48.557509+00:00","id":16764,"links":{},"metadata":{"_buckets":{"deposit":"3c0b6b9d-3bdf-4afe-aa6b-cb251b406f3e"},"_deposit":{"created_by":3,"id":"16764","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16764"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016764","sets":["95:239:638"]},"author_link":["27461","27459","27460"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Study on Fundamental Pad Conditioning Mechanism for Chemical Mechanical Polishing (2nd report)"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2006","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"31","bibliographicPageStart":"24","bibliographicVolumeNumber":"6","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域共同研究センター紀要"},{"bibliographic_title":"Report of Cooperative Research Center, Saitama University","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-03-09","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"The novel conditioner was developed for uniform conditioning across a pad. The conditioner is composed by bendable fibers. Therefore, each abrasive conforms independently to the pad surface, differently from the traditional conditioner of plate type. The removal rate using the developed conditioner is equal to that using the traditional conditioner. However, the cut rate of pad using the developed one is tenth part of the cut rate using traditional one. Therefore, it was demonstrated that the developed conditioner realized more efficient conditioning. In addition, in order to evaluate the conditioning non-uniformity effectively, novel uniformity evaluation method was developed. The principle uses color variation by abrading the pad dyed on the surface. As the result, the conditioning non-uniformity was 8.3% with the developed conditioner, compared with 23.8% with the traditional conditioner.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016758","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学総合研究機構地域共同研究センター産学連携推進部門"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474758","subitem_source_identifier_type":"ISSN"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Fujita, Takashi"},{"subitem_text_value":"Doy, Toshiro"},{"subitem_text_value":"Kamikawa, Daichi"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AA11808968-06-07"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"株式会社東京精密"},{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"芝浦工業大学"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"Tokyo Seimitsu Co.Ltd"},{"subitem_text_value":"Faculty of Education, Saitama University"},{"subitem_text_value":"Shibaura Institute of Technology"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2005"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"藤田, 隆"},{"creatorName":"フジタ, タカシ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"土肥, 俊郎"},{"creatorName":"ドイ, トシロウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"上川, 大地"},{"creatorName":"カミカワ, ダイチ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AA11808968-06-07.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AA11808968-06-07.pdf","url":"https://sucra.repo.nii.ac.jp/record/16764/files/KY-AA11808968-06-07.pdf"},"version_id":"bd51deae-6d78-49bb-96f7-9564fb896f84"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"CMP","subitem_subject_scheme":"Other"},{"subitem_subject":"conditioning","subitem_subject_scheme":"Other"},{"subitem_subject":"bendable fibers","subitem_subject_scheme":"Other"},{"subitem_subject":"efficient conditioning","subitem_subject_scheme":"Other"},{"subitem_subject":"conditioning non-uniformity","subitem_subject_scheme":"Other"},{"subitem_subject":"color variation","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"平坦化ＣＭＰにおけるパッドドレッシングに関する研究(第2報)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"平坦化ＣＭＰにおけるパッドドレッシングに関する研究(第2報)"}]},"item_type_id":"120","owner":"3","path":["638"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-09"},"publish_date":"2009-03-09","publish_status":"0","recid":"16764","relation_version_is_last":true,"title":["平坦化ＣＭＰにおけるパッドドレッシングに関する研究(第2報)"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T18:09:53.184513+00:00"}