{"created":"2023-05-15T15:27:49.656031+00:00","id":16790,"links":{},"metadata":{"_buckets":{"deposit":"8b04ea88-f362-4e7c-a4b8-78a2370c6a15"},"_deposit":{"created_by":3,"id":"16790","owners":[3],"pid":{"revision_id":0,"type":"depid","value":"16790"},"status":"published"},"_oai":{"id":"oai:sucra.repo.nii.ac.jp:00016790","sets":["95:239:639"]},"author_link":["27537","27536","27538","27539"],"item_120_alternative_title_1":{"attribute_name":"タイトル（別言語）","attribute_value_mlt":[{"subitem_alternative_title":"Basic Research on Conditioning of CMP Pad (2nd report)"}]},"item_120_biblio_info_8":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2007","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"26","bibliographicPageStart":"24","bibliographicVolumeNumber":"7","bibliographic_titles":[{"bibliographic_title":"埼玉大学地域共同研究センター紀要"},{"bibliographic_title":"Report of Cooperative Research Center, Saitama University","bibliographic_titleLang":"en"}]}]},"item_120_date_31":{"attribute_name":"作成日","attribute_value_mlt":[{"subitem_date_issued_datetime":"2009-03-02","subitem_date_issued_type":"Created"}]},"item_120_description_19":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"As the basic research for the Pad conditioning by the Diamond Conditioner, relationship between the surface condition of pad, which is ground by the diamond pad conditioner, and the Polishing Rate is investigated. Clogging of the pad surface, the surface conditions achieved by specification of the various pad conditioners and various parameters of the conditioning on the Oxide-CMP Process are correlated.","subitem_description_type":"Other"}]},"item_120_description_29":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"subitem_description":"text","subitem_description_type":"Other"}]},"item_120_description_30":{"attribute_name":"フォーマット","attribute_value_mlt":[{"subitem_description":"application/pdf","subitem_description_type":"Other"}]},"item_120_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.24561/00016784","subitem_identifier_reg_type":"JaLC"}]},"item_120_publisher_11":{"attribute_name":"出版者名","attribute_value_mlt":[{"subitem_publisher":"埼玉大学総合研究機構地域共同研究センター産学連携推進部門"}]},"item_120_source_id_14":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"13474758","subitem_source_identifier_type":"ISSN"}]},"item_120_text_3":{"attribute_name":"著者 ローマ字","attribute_value_mlt":[{"subitem_text_value":"Kadomura, Kazunori"},{"subitem_text_value":"Fukunishi, Toshio"},{"subitem_text_value":"Doi, Toshiro"},{"subitem_text_value":"Uchida, Ryota"}]},"item_120_text_32":{"attribute_name":"アイテムID","attribute_value_mlt":[{"subitem_text_value":"KY-AA11808968-07-07"}]},"item_120_text_4":{"attribute_name":"著者 所属","attribute_value_mlt":[{"subitem_text_value":"株式会社アライドダイヤモンド"},{"subitem_text_value":"株式会社アライドマテリアル"},{"subitem_text_value":"埼玉大学教育学部"},{"subitem_text_value":"埼玉大学教育学部"}]},"item_120_text_5":{"attribute_name":"著者 所属(別言語)","attribute_value_mlt":[{"subitem_text_value":"A.L.M.T. Diamond Corp."},{"subitem_text_value":"A.L.M.T. Corp."},{"subitem_text_value":"Faculty of Education, Saitama University"},{"subitem_text_value":"Faculty of Education, Saitama University"}]},"item_120_text_9":{"attribute_name":"年月次","attribute_value_mlt":[{"subitem_text_value":"2006"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"門村, 和徳"},{"creatorName":"カドムラ, カズノリ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"福西, 利夫"},{"creatorName":"フクニシ, トシオ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"土肥, 俊郎"},{"creatorName":"ドイ, トシロウ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"内田, 亮太"},{"creatorName":"ウチダ, リョウタ","creatorNameLang":"ja-Kana"}],"nameIdentifiers":[{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2018-01-24"}],"displaytype":"detail","filename":"KY-AA11808968-07-07.pdf","filesize":[{"value":"706.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KY-AA11808968-07-07.pdf","url":"https://sucra.repo.nii.ac.jp/record/16790/files/KY-AA11808968-07-07.pdf"},"version_id":"4be0557b-1760-4b01-8215-1188ccd72c23"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"CMP用パッドのコンディショニングに関する基礎研究（第二報）","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"CMP用パッドのコンディショニングに関する基礎研究（第二報）"}]},"item_type_id":"120","owner":"3","path":["639"],"pubdate":{"attribute_name":"公開日","attribute_value":"2009-03-03"},"publish_date":"2009-03-03","publish_status":"0","recid":"16790","relation_version_is_last":true,"title":["CMP用パッドのコンディショニングに関する基礎研究（第二報）"],"weko_creator_id":"3","weko_shared_id":-1},"updated":"2023-05-15T18:08:45.702481+00:00"}