@misc{oai:sucra.repo.nii.ac.jp:00009634, author = {JHANTU, KUMAR SAHA}, month = {}, note = {学位記号番号: 博理工甲第667号, 博士の専攻分野の名称 : 博士(学術) 学位授与年月日 : 平成20年3月24日, text, application/pdf}, title = {Fast growth of microcrystalline silicon thin-films from dichlorosilane by the high-density microwave plasma source using the spoke antenna for Si thin-film solarcells}, year = {2008} }