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上下アクチュエータを用いた精密機器の水平相対変位制御
https://sucra.repo.nii.ac.jp/records/13880
https://sucra.repo.nii.ac.jp/records/1388071694413-b718-4651-8091-def725d0e0a8
名前 / ファイル | ライセンス | アクション |
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A3000092.pdf (592.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2009-09-11 | |||||
タイトル | ||||||
タイトル | 上下アクチュエータを用いた精密機器の水平相対変位制御 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Active Vibration Control | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Piezoelectric Actuator | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Optimal Regulator | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Kalman Filter | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
タイトル(別言語) | ||||||
その他のタイトル | A Horizontal Relative Displacement Control of Precision Machines Using Vertical Actuators | |||||
著者 |
田中, 基八郎
× 田中, 基八郎× 栗原, 雅樹× 礒谷, 仁 |
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著者 ローマ字 | ||||||
TANAKA, Kihachirou | ||||||
著者 ローマ字 | ||||||
KURIHARA, Masaki | ||||||
著者 ローマ字 | ||||||
ISOTANI, Hitoshi | ||||||
著者 所属 | ||||||
(株)日立製作所機械研究所 | ||||||
著者 所属 | ||||||
(株)日立製作所機械研究所 | ||||||
著者 所属 | ||||||
(株)日立製作所機械研究所(現 : 埼玉大学工学部) | ||||||
著者 所属(別言語) | ||||||
著者 所属(別言語) | ||||||
著者 所属(別言語) | ||||||
Department of Mechanical Engineering, Saitama University | ||||||
書誌情報 |
日本機械学會論文集. C編 巻 64, 号 625, p. 3414-3419, 発行日 1998 |
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年月次 | ||||||
1998-09 | ||||||
出版者名 | ||||||
出版者 | 社団法人日本機械学会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03875024 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This paper describes all active vibration control system which controls horizontal relative displacement using vertical actuators. In precision machines, it is essential to reduce the horizontal relative displacement between two important elements e.g. an object glass and the specimen table of a scanning electron microscope. The vibration control system is composed of passive devices with springs and dampers, and vertical actuators arranged parallel to the passive devices. In an experiment, a machine model on a base and the active vibration control system were modeled after two masses and four degrees-of-freedom, and vertical actuators were controlled by state feedback and a Kalman filter with respect to floor vibrations. An experiment for controlling the horizontal relative displacement of a machine model through vertical actuators was done, so that effectiveness of the active vibration control system could be verified. | |||||
注記 | ||||||
内容記述タイプ | Other | |||||
内容記述 | rights: 社団法人日本機械学会 rights: 本文データは学協会の許諾に基づきCiNiiから複製したものである relation: IsVersionOf: http://ci.nii.ac.jp/naid/110002383983/ |
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その他の言語 | ||||||
言語 | eng | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-09-11 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
A3000092 |