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超音波顕微鏡による薄膜弾性係数測定手法の検討
https://sucra.repo.nii.ac.jp/records/12730
https://sucra.repo.nii.ac.jp/records/1273082ae0587-0a8c-452b-b06d-6d2e8dc26453
名前 / ファイル | ライセンス | アクション |
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A3000149.pdf (530.6 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2007-09-11 | |||||
タイトル | ||||||
タイトル | 超音波顕微鏡による薄膜弾性係数測定手法の検討 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Elasticity | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Material Testing | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Nondestructive Inspection | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ultrasonic | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thin Film | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Substrate | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Scanning Acoustic Microcope | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | LSI | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
タイトル(別言語) | ||||||
その他のタイトル | Approach for Measuring Elastic Modulus of Thin Film by Scanning Acoustic Microscope | |||||
著者 |
荒居, 善雄
× 荒居, 善雄× 轟, 章× 小林, 英男× 中村, 春夫× 朴, 位坤× 飯田, 英徳 |
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著者 ローマ字 | ||||||
Arai, Yoshio | ||||||
著者 ローマ字 | ||||||
Todoroki, Akira | ||||||
著者 ローマ字 | ||||||
Kobayashi, Hideo | ||||||
著者 ローマ字 | ||||||
Nakamura, Haruo | ||||||
著者 ローマ字 | ||||||
Park, Wigon | ||||||
著者 ローマ字 | ||||||
Iida, Hidenori | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属(別言語) | ||||||
Graduate School of Science and Engineering, Saitama University | ||||||
書誌情報 |
日本機械学會論文集. A編 巻 59, 号 568, p. 2977-2983, 発行日 1993 |
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年月次 | ||||||
1993-12 | ||||||
出版者名 | ||||||
出版者 | 社団法人日本機械学会 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 03875008 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Measuring elastic properties of thin film on substrates is important in the analysis of residual stresses of advanced 3D LSI. In this study, an approach to for nondestructive measurement of the elastic properties of thin film on the substrate nondestructively with a scanning acoustic microscope is proposed. The approach was analyzed mathematically and was applied to aluminum film on glass substrates. As a result, this approach was proved to be excellent for the objective, and the elastic modulus of aluminum film on the glass substrate was 10% smaller than that of the bulk data. | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2007-03-05 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
A3000149 |