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SiC単結晶のCMP プロセス改善に関する一検討
https://doi.org/10.24561/00016781
https://doi.org/10.24561/000167811fb13495-e8ab-44da-b9af-42ab3e7f34cf
名前 / ファイル | ライセンス | アクション |
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KY-AA11808968-07-04.pdf (608.3 kB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-03-03 | |||||
タイトル | ||||||
タイトル | SiC単結晶のCMP プロセス改善に関する一検討 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SiC | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | CMP | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | oxidizing agent | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016781 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | The Advanced CMP Process of SiC Single Crystal | |||||
著者 |
中原, 良彦
× 中原, 良彦× 土肥, 俊郎 |
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著者 ローマ字 | ||||||
Nakahara, Yoshihiko | ||||||
著者 ローマ字 | ||||||
Doi, Toshiro | ||||||
著者 所属 | ||||||
秩父電子株式会社 | ||||||
著者 所属 | ||||||
埼玉大学教育学部 | ||||||
著者 所属(別言語) | ||||||
Chichibu Electronics Corporation | ||||||
著者 所属(別言語) | ||||||
Faculty of Education, Saitama University | ||||||
書誌情報 |
埼玉大学地域共同研究センター紀要 en : Report of Cooperative Research Center, Saitama University 巻 7, p. 11-13, 発行日 2007 |
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年月次 | ||||||
2006 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学総合研究機構地域共同研究センター産学連携推進部門 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 13474758 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | We developed an advanced Chemical Mechanical Polishing (CMP) technology for Silicon-Carbide (SiC) single crystal, using oxidative polishing slurry. Using Potassium Permanganate, instead of Hydrogen Peroxide, we found the polishing rate was enhanced. We also found the quality of polished surface was improved; the number of scratches and pits are reduced. The steps of the atomic-layer are observed by Atomic Force Microscope (AFM) observation. | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-03-02 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-AA11808968-07-04 |