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大気圧熱プラズマジェットによる a-Si 相変化の実時間計測
https://doi.org/10.24561/00016471
https://doi.org/10.24561/00016471a1c330ac-37b5-4254-b487-bb2f3d3cac7f
名前 / ファイル | ライセンス | アクション |
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KY-18838278-15.pdf (4.7 MB)
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Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 2009-08-18 | |||||
タイトル | ||||||
タイトル | 大気圧熱プラズマジェットによる a-Si 相変化の実時間計測 | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
ID登録 | ||||||
ID登録 | 10.24561/00016471 | |||||
ID登録タイプ | JaLC | |||||
タイトル(別言語) | ||||||
その他のタイトル | Real Time Diagnostics of the Crystallization of Amorphous Silicon Utilizing a RF Thermal Plasma Torch | |||||
著者 |
太田, 直希
× 太田, 直希× 春田, 浩司× 清水, 宏一× 小林, 知洋× 白井, 肇 |
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著者 ローマ字 | ||||||
Ohta, Naoki | ||||||
著者 ローマ字 | ||||||
Haruta, Koji | ||||||
著者 ローマ字 | ||||||
Shimizu, Hirokazu | ||||||
著者 ローマ字 | ||||||
Kobayashi, Tomohiro | ||||||
著者 ローマ字 | ||||||
Shirai, Hajime | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属 | ||||||
埼玉県産業技術総合センター | ||||||
著者 所属 | ||||||
理化学研究所 | ||||||
著者 所属 | ||||||
埼玉大学大学院理工学研究科 | ||||||
著者 所属(別言語) | ||||||
The Graduate School of Science and Engineering, Saitama University | ||||||
著者 所属(別言語) | ||||||
The Graduate School of Science and Engineering, Saitama University | ||||||
著者 所属(別言語) | ||||||
Saitama Industrial Technology Center (SAITEC) | ||||||
著者 所属(別言語) | ||||||
The Institute of Physical and Chemical Research (RIKEN) | ||||||
著者 所属(別言語) | ||||||
The Graduate School of Science and Engineering, Saitama University | ||||||
書誌情報 |
埼玉大学地域オープンイノベーションセンター紀要 en : Report of Comprehensive Open Innovation Center, Saitama University 巻 1, p. 41-48, 発行日 2009 |
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年月次 | ||||||
2008 | ||||||
出版者名 | ||||||
出版者 | 埼玉大学総合研究機構地域オープンイノベーションセンター | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 18838278 | |||||
概要 | ||||||
内容記述タイプ | Other | |||||
内容記述 | Crystallization mechanism of hydrogenated amorphous silicon (a-Si:H) by using the atmospheric pressure radio-frequency thermal plasma jet (AP-TPJ) is discussed through the real time monitoring of the surface temperature, optical transmittance, and reflectance profiles. The film crystallization proceeds through the three steps, i.e., dehydrogenation, solid phase crystallization (SPC) and subsequent coalescence of small crystalline grains. The SPC occurs at 750°C, which was almost independent of the rising speed of surface temperature. However, the coalescence stage depended on the surface temperature profile and the maximum surface temperature, which determined the average crystalline grain size. | |||||
その他の言語 | ||||||
言語 | eng | |||||
版 | ||||||
[出版社版] | ||||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text | |||||
フォーマット | ||||||
内容記述タイプ | Other | |||||
内容記述 | application/pdf | |||||
作成日 | ||||||
日付 | 2009-08-18 | |||||
日付タイプ | Created | |||||
アイテムID | ||||||
KY-18838278-15 |